BINARY OPTICS, AND LIGHT CONVERGENCE OPTICAL SYSTEM AND LASER MACHINING DEVICE USING BINARY OPTICS

摘要

PROBLEM TO BE SOLVED: To provide a binary optics or light convergence optical system which can efficiently obtain a laser beam that is in a desired beam shape such as a rectangular or linear shape and has a uniform intensity distribution from laser light of high-order mode that is in a circular beam shape and has a mountain-shaped intensity distribution, and the laser beam machine which can perform efficient laser machining by using them. ;SOLUTION: A laser beam in a desired sectional shape can easily be converted without any loss of energy by the binary optics 1 having the array- directional pitch of diffraction grating at respective positions in an element designed corresponding to the shape and intensity distribution of incident light and the shape and intensity distribution of desired converted projection light and the optical system which uses it, so a laser machining process is made advantageous and efficient machining becomes possible. Further, a laser device of this constitution makes the laser machining advantageous and makes the highly efficient machining possible.;COPYRIGHT: (C)1997,JPO