BINARY OPTICS AND LASER BEAM MACHINING DEVICE

摘要

PROBLEM TO BE SOLVED: To make a laser machining process advantageous and to enable efficient machining by designating the arraying direction and the pitch of diffraction grating at each position on a binary optics corresponding to the shape and the intensity distribution of incident light the straight, belt-like of desired intensity distribution of an emitted light to convert. SOLUTION: A laser beam forms a circular beam shape and is magnified by a beam magnifier before entering the binary optics 3 to enter to match its optical axis with the center of the optics. At the time of setting the length of a line segment PQ to be (d) and the wavelength of light to be , a distance to the position of obtaining desired intensity distribution from the optics 3 to be (h), the pitch (p) is expressed as p=(1+h2 /d2 ) at the diffraction grating of this optics 3.