GSM-MoM/FDTD analysis for a unit-cell of 1m -orderd slotted waveguide arrays with equivalent plasma load and array design for uniform plasma density distribution

摘要

The authors have proposed 1 m -ordered plasma equipment using slotted waveguide arrays. Microwave at 2.45 GHz is used for the excitation. Design for uniform aperture electromagnetic (EM) field distribution on the vacuum window is succeeded by t