CERAMIC-METAL INTERFACES IN ELECTRONIC CERAMICS-INTERFACE BETWEEN AIN CERAMICS AND CONDUCTORS

摘要

In this study we investigated the interface between A1N ceramics and W conductors. CaO in the A1N ceramic forms a liquid phase with Al_2O_3, and the liquid phase moves towards the W conductor and reacts with Al_2O_3 in the W conductor. As a result an interlocking interface formed which contributes to strong adhesion between the A1N ceramic and W conductor.