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Diamond coatings on surface-modified carbide tools using KrF pulsed laser

机译:使用KRF脉冲激光表面改性硬质合金工具上的金刚石涂层

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The surface of a cemented carbide was modified using a KrF pulsed laser process to achieve a microrough structure, leading to stronger adherence of diamond films to cemented carbide substrates. The surface morphology and roughness were investigated with laser conditions. After the surface modification with the laser and the etching of the modified surface, heat treatment was performed prior to deposition of diamond film in order to observe changes in surface morphology and adhesion. Diamond films were grown by chemical vapor deposition process. The results indicated that the heat treatment of the modified cemented carbide improved the adhesion of diamond films by the recrystallization of tungsten carbides into the fine and long grains. As laser energy for the modification of a cemented carbide increased, the surface roughness increased and tungsten carbide (WC) was transformed to WC_(1-x)(X=0-0.3) and then to W_2C.
机译:使用KRF脉冲激光方法改变粘合碳化物的表面以实现微黄结构,导致金刚石膜的粘附牢固地粘附到硬质合金基板上。通过激光条件研究了表面形态和粗糙度。在用激光和改性表面的蚀刻表面改性之后,在沉积金刚石膜之前进行热处理,以观察表面形态和粘附的变化。通过化学气相沉积工艺生长金刚石薄膜。结果表明,改性硬质合金的热处理改善了金刚石薄膜的粘附通过将碳化钨的重结晶重结晶进入细粒和长颗粒。随着激光能量的改性碳化物碳化物的增加,将表面粗糙度增加和碳化钨(WC)转化为WC_(1-X)(x = 0-0.3),然后转至W_2C。

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