A comparative study of residual stresses in single and multilayer composite diamond coatings

摘要

Residual stresses in four types of diamond films deposited by hot filament chemical vapor deposition on molybdenum substrae, three types on tungsten carbide or silicon nitride substrate are measured. Residual stresses are determined by X-ray method and Raman spectroscopy. The results from both these techniques are compared and conclusions are made on the mechanisms of adhesion of diamond films to the different substrates.