In-situ characterization of laser deposited Fe/Ag multilayers by a combination of time-of-flight, rheed and resistance measurements

摘要

Fe/Ag multilayers, prepared by pulsed laser deposition (PLD) using KrF radiation, were characterized in-situ by RHEED (diffraction of high energetic electrons) and resistance measurements during deposition, and by X-ray diffraction after deposition. While the x-ray diffraction experiments give indications for sharp interfaces, the in-situ investigations clearly show an asymmetry of the structural behaviors at the interfaces and mixing effects on a nm scale, especially as soon as Fe is deposited on Ag. Time-of-flight (TOF) measurements performed with a Faraday cup show that during PLD in ultrahigh vacuum ions are deposited with kinetic energies of more than 100 eV. The results are modeled and discussed with respect to implantation and mixing effects due to the high kinetic energy of the deposited particles during PLD.