Fabrication of an integrated mixing/reaction micro flow cell for muTAS

摘要

An integrated mixing/reaction micro flow cell, which consists of a mixing part, a stirring part and a reaction part, is proposed and its components are fabricated. Micro nozzle array of macro porous Si is employed for injection mixing and a SAW device of LiNbO_3 is used as an actuator of the stirring part. A Ti-Pt thin film heater and a p-n junction diode temperature sensor are integrated on the reaction part to realize precise temperature control.