Microfabricated channels and fluid control systems for integrated flow injection analysis

摘要

An integrated fow injection analysis (FIA) system on a glass chip has been achieved in the channels with various scales. It is intended that the channels of 10 to 200 mum wide are used for analytical chemistry and that those of less than 1 mum wide for physical chemistry. The channel of 200 mum wide and 100 mum deep is fabricated by CO_2 laser cutting and thermally bonding. The isotropic wet etching with HF/NH_4F is used for the channel with 30 mum wide and 10 mum deep. The etched Pyrex glass and the cover Pyrex glass are thermally bonded together. Further, the anisotropic dry etching such as reactive ion etching is performed for the channel with 1 mum wide and 1 mum deep. the etched Pyrex glass is anodically bonded to the Si wafer covered with silicon oxide film (800nm thick), which is consequently used as a cover glass. A new anisotropic etching technique using fact atom beam is carried out and the channel of 50 nm wide and 360 nm deep can be botaiend. In all of the FIA systems, the chelating reaction of FE(II) and o-phenanthroline has been realized.