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STABILITY OF THE EFFECTIVE ACCOMMODATION COEFFICIENT OF SPINNING ROTOR GAUGES

机译:纺纱仪表的有效容纳系数的稳定性

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A spinning rotor gauge (SRG) is a popular transfer standard in the pressure range of 0.001 Pa to 1 Pa. The popularity stems from the fact that the effective accommodation coefficient of SRGs, which is directly tied to its calibration, has shown remarkable stability. At the National Institute of Standards and Technology (NIST), SRGs, submitted by companies requesting calibration, as well as our internal check standards, are calibrated with a primary vacuum standard and the calibration results are entered in a database. A general picture of the stability of the accommodation coefficient can be obtained by analyzing the past calibration records. The analysis of past customer calibration records over seventeen years, involving 59 SRGs and more than 180 calibrations, shows that the absolute value of the changes in their accommodation coefficient between two successive calibrations (typically 2 to 3 years) had a mean of 1.0 %. But for our check standards, which remain on the vacuum chamber at all times, the mean change is less than 0.20%. We are interested in the cause or causes of these changes and we have identified and quantified a few effects that may result in a shift in the accommodation coefficient. The results will be presented and discussed.
机译:旋转转子仪表(SRG)是普遍的转移标准,在0.001Pa至1 pa的压力范围内。普及源于SRG的有效容纳系数,直接与其校准直接相关,表明了稳定性的稳定性。在国家标准和技术研究所(NIST),由请求校准的公司提交的SRGS以及我们的内部检查标准,并以主要的真空标准校准,并在数据库中输入校准结果。通过分析过去的校准记录,可以获得容纳系数的稳定性的一般图像。涉及59个SRG和超过180次校准的过去客户校准记录的分析表明,其在连续校准(通常2至3年)之间的容纳系数变化的绝对值的平均值为1.0%。但对于我们的检查标准,始终保持在真空室上,平均变化小于0.20%。我们对这些变化的原因或原因感兴趣,我们已经确定并量化了一些可能导致在容纳系数的变化的效果。结果将呈现和讨论。

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