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ADVANCES IN DIMENSIONAL METROLOGY

机译:维度计量的进展

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Gauge blocks and length bars provide industry with a convenient form of secondary length standard for checking the accuracy of mechanical components. To ensure that the length of these gauges is traceable to international standards they are measured in instruments which use calibrated sources of light as the measurement scale. The design of a new generation of instruments for the automatic measurement of length standards has been made possible by recent developments in frequency stabilized lasers and in advances in instrumentation and computing techniques. NPL has developed an automatic gauge block interferometer which can provide the absolute measurement of length of gauge blocks from 0.1 mm to 300 mm with an accuracy of ±20nm and ±90nm respectively. The instrument uses red and green HeNe lasers to provide the measurement wavelengths and television/computer techniques to analyze the data. A very recent development has been to add a white light and fringe counting interferometer to this instrument. This enables gauges to be measured in one instrument, without the normal requirement of determining the approximate gauge length by another technique. NPL is also developing an interferometer for the automatic measurement of length bars from 100 mm to 1500 mm. This will use a phase stepping interferometer with very careful control of the environment in the measurement area.
机译:规格块和长度杆为具有方便形式的二级标准提供行业,用于检查机械部件的精度。为了确保这些仪表的长度可追溯到国际标准,它们在使用校准光源作为测量标度的仪器中测量。通过频率稳定激光器的最新进展和仪表和计算技术的进步,已经实现了新一代用于自动测量长度标准仪器的设计。 NPL开发了一种自动规格块干涉仪,其可以提供0.1mm至300mm的规格块长度的绝对测量,精度分别为±20nm和±90nm。仪器使用红色和绿色肝激光器提供测量波长和电视/计算机技术来分析数据。最近的发展是为该仪器添加白光和边缘计数干涉仪。这使得能够在一个仪器中测量仪表,而无需另一种技术确定近似规格长度的正常要求。 NPL还在开发一种干涉仪,用于自动测量从100mm至1500mm的长度杆。这将使用相位步进干涉仪,非常仔细地控制测量区域中的环境。

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