Characteristic analysis of basic mechanisms with large deflective elastic hinges for three-dimensional micromechanisms

摘要

In this paper, a basic mechanism of three-dimensional micromechanisms is proposed by making use of number synthesis of mechanisms. The output point of the proposed mechanism can move in the vertical direction when two linear input points move in the inverse horizontal direction, and can move horizontal direction when two linear input points move in the same horizontal direction. The validity and the characteristics of the proposed mechanism are investigated theoretically and experimentally by using a polyethylene macromodel manufactured by a small modeling injection machine. Finally, an example of a micromechanism manufactured by semiconducter fine-machining technique is shown.