Vibration signature analysis sensor for predictive diagnostics

摘要

This paper describes frequency resolved vibration sensors for signature analysis on (electro)mechanical components. The application is predictive diagnostics and condition based maintenance on Xerographic printer and copier products. The Vibration Signature Analysis (VSA) sensing devices consist of micromachined arrays of closely spaced silicon mechanical resonators covering a frequency range of 120 Hz to 100 kHz. Resonance of a particular element is detected with a Wheatstone bridge of implanted piezoresistors and the bridge outputs are multiplexed onto a common output line using on-chip p-MOS transistor switches. The design and fabrication of the VSA devices is presented.