Mechanism of anneal proton exchange to fabricate waveguides on LiNbO3

摘要

Anneal proton-exchanged planar waveguides on LiNbO$-3$/ are investigated on aspect of crystallography and of optical properties. The strains and stress on crystalline lattices of LiNbO$-3$/ due to proton exchange and annealing respective are measured by DDX (Double Diffraction of X-ray) and IR spectrometer. We study theoretically and experimentally the induced photoelastic and piezoelectric effects inside exchanged layer to explore mechanism of anneal. That demonstrates annealing technology being a efficient compensation permits to ameliorate the quality of waveguide and deduced optical propagating loss.