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Method of manufacturing a bragg lattice by proton exchange on a waveguide ti: linbo3

机译:通过在波导ti上进行质子交换来制造布拉格晶格的方法ti:linbo3

摘要

A mask is formed on the surface of the electro-optical material, using photolithography. The grating is then formed by effecting a proton exchange through the mask, defining regions having different refractive indices. The process for manufacture of a Bragg grating on a wave guide uses an electro-optical material. A mask is formed on the surface of the electro-optical material, and the grating is formed by effecting a proton exchange through the mask. The mask may be formed by a process of photolithography. The waveguide itself is formed by diffusion of an element into the electro-optic material, which may be lithium niobate or lithium tantalite. The element used for diffusion is titanium, whilst the proton exchange is carried out in a bath of pure benzoic acid. The final grating is produced by means of a sequence of zones of electro-optic material having different refractive indices.
机译:使用光刻法在电光材料的表面上形成掩模。然后通过穿过掩模进行质子交换而形成光栅,从而限定具有不同折射率的区域。在波导上制造布拉格光栅的过程使用电光材料。在电光材料的表面上形成掩模,并且通过穿过掩模进行质子交换来形成光栅。掩模可以通过光刻工艺形成。波导本身是通过将元素扩散到电光材料中形成的,该材料可以是铌酸锂或钽酸锂。用于扩散的元素是钛,而质子交换是在纯苯甲酸浴中进行的。最终的光栅是通过具有不同折射率的一系列电光材料区域产生的。

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