The design of a noble VCSEL with DOE

摘要

A brand-new approach in developing VCSEL lense is presented in this paper. Using the laser process or yellow light lithography process, we can merge semiconductor laser and diffraction optics elements (DOE) to become a single semiconductor optoelectronic device. To match the surface topology of the DOE with the structure of semiconductor laser, the DOE is carved on the SiO2 layer of the vertical-cavity surface-emitting laser (VCSEL). The chiseled optoelectronic semiconductor element becomes as a DOE-VCSEL device, it has the DOE function to control the emission distribution of the emitting laser.