Self-learning intellectual system of expert diagnostics of technological malfunctions in ULSI manufacturing

摘要

The field of Information Intellectual System (IIS) application in technology spreads over solving problems, that cannot be easily formalized and that are connected with the diagnostics and quality control of ULSI. One of the main tasks of IIS in the technology of Microelectronics is the precedent search. Another task no less serious is to mathematically process technological experience using information coded array. The purpose of it is, firstly, to establish interrelation between symptomatic and failures and, secondly, to choose an optimal plan of rehabilitation of the technological process and the crystal. The paper describes the basic concepts and principles of software and mathematical software development for computer system of expert diagnostics of technological malfunctions in ULSI manufacturing. The system includes: data base (DB), knowledge base (KB), and subsystems (of precedent search, expert diagnostics and consultations on rehabilitation). DB and KB contain information of defects. The research prototype of this system was realized on IBM PC$+3.5$/.