MODELING AND CHARACTERIZATION OF NANOWIRES WITH MICROCANTILEVER BEAMS

摘要

Mechanical behavior of a nanowire-microcantilever beam structure under electrostatic actuation was studied using the FE method. A comparison for the resonant frequencies between a nanowire-microcantilever structure and a microcantilever only is presented. Several factors affecting the resonant frequency of the nanowire-microcantilever structure, such as actuation voltage and fabrication effects on geometries are discussed. Also, alignment effect of the nanowires with the microcantilever beam is investigated. This study can be utilized to predict Young's modulus of nanowires.