A contribution to the quantitative comparison of experimental high-resolution electron micrographs and image simulations

摘要

For the assessment of the reliability of any measurements from high-resolution transmission electron microscope (HREM) images it will be necessary to match quantitatively experimental and calculated images. Using a focal series from a cleaved GaAs/AlGaAs specimen we compared the Fourier spectra of the experimental and cal-culated image intensities for various thicknesses and spatial frequencies at Scherzer focus. The result is a significant discrepancy between the experimental and calculated data, depending on the spatial frequency and the specimen thickness, although the overall form of the thickness dependence of the Fourier components could be rather well reproduced.