首页> 外文会议>Solid-state sensor, actuator, and microsystems workshop >MULTIELECTRODE MICROPROBES FOR DEEP-BRAIN STIMULATIONFABRICATED USING A NOVEL 3-D SHAPING ELECTROPLATING PROCESS
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MULTIELECTRODE MICROPROBES FOR DEEP-BRAIN STIMULATIONFABRICATED USING A NOVEL 3-D SHAPING ELECTROPLATING PROCESS

机译:使用新型3-D塑形电镀工艺进行深脑刺激的多电极微生物

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This paper describes a novel 22-mm-long multi-channelmicroelectrode suitable for deep-brain stimulation in rodents. Theplatinum electrodes and conducting interconnects are insulated bysilicon nitride and the mechanical support is provided by a 3-Delectroplated biocompatible metallic structure. The shape of theprobe has been designed to provide sufficient mechanical stiffnessfor accurate targeting of deep-brain regions while minimizingtissue damage. The probe thickness and width are smoothlytapered from the 200-μm-wide and 150-μm-thick shank to the10-μm-thick probe tip. The electrical and mechanical properties ofthe electrode array have been tested and show an impedance of4.5 k? at 10 kHz.
机译:本文介绍了一种新型22毫米长的多通道刻度电极,适用于啮齿动物的深脑刺激。该凝固素电极和导电互连是通过氮化硅绝缘的,并且机械支撑由3次兼容的生物相容性金属结构提供。突出的形状旨在提供足够的机械僵硬,可精确靶向深脑地区,同时最小化损伤。探头厚度和宽度是从200μm宽的150μm厚的柄柄到10-μm厚的探针尖端的平滑兆。已经测试了电极阵列的电气和力学性能,并显示了4.5k的阻抗?在10 kHz。

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