MULTIELECTRODE MICROPROBES FOR DEEP-BRAIN STIMULATIONFABRICATED USING A NOVEL 3-D SHAPING ELECTROPLATING PROCESS

摘要

This paper describes a novel 22-mm-long multi-channelmicroelectrode suitable for deep-brain stimulation in rodents. Theplatinum electrodes and conducting interconnects are insulated bysilicon nitride and the mechanical support is provided by a 3-Delectroplated biocompatible metallic structure. The shape of theprobe has been designed to provide sufficient mechanical stiffnessfor accurate targeting of deep-brain regions while minimizingtissue damage. The probe thickness and width are smoothlytapered from the 200-μm-wide and 150-μm-thick shank to the10-μm-thick probe tip. The electrical and mechanical properties ofthe electrode array have been tested and show an impedance of4.5 k? at 10 kHz.