1200 Mirror Array Integrated with CMOS for Photonic Switching:Application of Mechanical Leveraging and Torsional Electrostatic ActuationTo Reduce Drive Voltage Requirements and Increase Angular Tilt

摘要

The design, fabrication, and performance of a 1200 mirrorarray for photonic switching applications are presented. Torsionalelectrostatic actuators are combined with angular amplifiersderived from 4-bar mechanisms to improve the mechanicalperformance of the devices to 8o while maintaining the switcheddrive voltage requirements at 120V. The process technology andthe integration of the mirror array with a custom drive ASIC isalso discussed briefly. The mirrors are being used in atelecommunication application to form the basis of a 1200 portoptical switch.