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Numerical analysis for relief gratings working in the soft xray and XUV region by the integral equation method

机译:通过整体方程法在软X射线和XUV区域工作的浮雕光栅的数值分析

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Differential formalism gives a rapid convergence of accurate results even under conditions of propagation of several hundred spectral orders and grazing angles of incidence for the gratings with low groove-depth-to-groove-spacing ratio (h/d $VLS 1) which are typical for this wavelength region. In the same way it was found that the rigorous results on the region of low $delta@/d ratios under the short time of computation may also be done through the modified integral method. By way of the programs created on the base of integral equations, the results done through the differential method were repeated and a good coincidence with them was found. These data allow us to speak about the equivalence of both methods - integral and differential - and about the convergence of algorithms.
机译:差分形式主义即使在几百个光谱订单的传播条件下提供了准确的结果的快速收敛性,以及具有低沟槽深度到槽间距比(H / D $ VLS 1)的光栅的入射角(H / D R $ VLS 1)的进出率。对于该波长区域。以相同的方式发现,在计算短时间的低价Δ@ / D比下的严格结果也可以通过修改的积分方法来完成。通过在整体方程基础上产生的程序,重复通过差分方法完成的结果,并发现它们良好的巧合。这些数据允许我们谈谈两种方法的等价性 - 积分和差异 - 以及算法的收敛性。

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