New developments in mass-transport fabrication for reliable high-performance integrated optoelectronic devices (Invited Paper)

摘要

Current investigations of material issues in mass-transport fabrication are reviewed. Evaporation loss and resulting surface roughness have been identified and simple techniques developed for effective prevention. Photoluminescence intensity degradation and improvement were observed under different experimental conditions. Evidence of defect generation associated with high transport rate has also been observed. Extension of mass transport to GaAs based heterostructure lasers showed considerable promise for advanced integrated structures with high performance and improved reliability.