Laser ablation of a target and subsequent deposition of films is a widespread method of high temperature superconducting (HTSC) thin films fabrication. High intensity of laser light acting on the target ensures the conservation of stoichiometry in the deposited films. High temperature of evaporated materials in the laser plume provides high concentration of excited atoms and ions, allowing the reduction of the temperature needed for the epitaxial growth. High density of the evaporated materials stream near the substrate gives the possibility of fabricating very thin and unbroken films. All these features of laser assisted materials deposition allow the preparation of epitaxial HTSC thin films of very high quality. We briefly report the results of the application of lasers for HTSC film creation, their testing, and structuring at Moscow State University.
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