A normally closed microvalve and micropump were fabricated on a silicon wafer by micromachining techniques. Normally closed microvalve has a silicon diaphragm and a small piezoelectric actuator to drive it. The controllable gas flow rate is from 0.1 ml/min to 85 ml/min at a gas pressure of 0.75 kgf/cm/sup 2/. The micropump is a diaphragm-type pump which consists of two polysilicon one-way valves and a diaphragm driven by a small piezoelectric actuator. The maximum pumping flow rate and pressure are 20 mu l/min and 780 mmH/sub 2/O/cm/sup 2/, respectively.
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机译:通过微机械化技术在硅晶片上制造了常闭的微伏和微泵。常闭微型阀具有硅隔膜和小型压电致动器以驱动它。可控气体流速在0.75kgf / cm / sup 2 /的气体压力下为0.1ml / min至85ml / min。 Micropump是一个隔膜型泵,由两个多晶硅单向阀和由小型压电致动器驱动的膜片组成。最大泵送流量和压力分别为20μmL/ min,分别为780mmH / sub 2 / o / cm / sup 2 /。
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