MEMS-integrated PDMS metasurface designed for autonomous vehicles sensing: a new approach for LiDAR application

摘要

We demonstrate dynamic beam steering by mechanically tuning a flexible 20° beam deflector metasurface made ofPDMS. The deflective device is a 2D array consist of resonant sub-wavelength meta atoms operating at 1550 . Thetuning is obtained by a designated stretching device able to strongly clamp and stretch a flexible metasurface allowingthe monitoring and controlling of the applied external strain. Stretching a deflector changes the array geometry whichconsequently changes the aperture phase function. This results in a continuous change of the deflection angle thuscreating a beam scanner. We show the steering range can reach 9.9° with a corresponding stretch ratio of 1.73. Theseresults validates the potential of reconfigurable metasurfaces to yield dynamic beam steering which is an essentialbuilding block for both existing and future optical systems.