Research on surface extension process technology for restraining edge effect in CNC polishing

摘要

Aiming at the improvement of edge effect in CNC polishing. A new polishing method based on the surface extension isproposed. The basic idea and workflow are presented. The availability of this method is verified by simulation. Exprimentalstudy was carried out on 420mm×420mm caliber fused quartz optical element. The exprimental results show that thismethod can restrain the collapse and warped edge surface. PV less than λ/3，GRMS less than 7.7nm/cm and PSD1 less than1.8nm can be obtained combining the small scale smoothing technology.