An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof

摘要

This paper presents an alignment scheme for SiOB fabrication using an electromagnetic force-driven microactuator with five degrees of freedom (5 DOF) of movement. The actuator comprising four sets of corrugated springs and spiral coils driven by Lorentz and reluctant force respectively can accomplish linearly horizontal and vertical displacement and tilt angle ranging within 2 and 10.5μm, and 0.1° for positioning optical lens with a resolution of 0.1μm, which has been experimentally validated to facilitate the scheme feasibly.