Bend testing of micro-scale bulk metal specimens using a chip-scale test instrument

摘要

We describe bend testing of micro- to meso-scale specimens of 302 stainless steel, using a MEMS test instrument. The specimens had gauge length of 350 microns, gauge width of 60 microns, and the thickness of 25 microns, and were made by lithographic etching of commercial stainless steel foil. We describe the use of a MEMS actuator to apply in-plane bending loads to the stainless steel specimens. The specimens' flexural stiffness obtained with this technique was in agreement with that obtained using a much larger table-top measurement system, but with an approximately 1000× reduction in size of the actuator.