A method of measuring the dimensionless extinction coefficient for optical thin-film layers of weakly absorbing filmformingmaterials using a parallelepiped form attachment is presented. The attachment uses frustrated total internalreflection to multiply radiation losses in tested thin film layers. Influences of some main factors on accuracy of the methodhave been studied and the results show that those influences can be compensated and as the result of it the measurementerror can be reduced to 1%.
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