A FINITE-IMPULSE-RESPONSE-BASED APPROACH TO CONTROL ACOUSTIC-CAUSED PROBE-VIBRATION IN ATOMIC FORCE MICROSCOPE IMAGING

摘要

In this paper, we propose a finite-impulse-response (FIR)-based feedforward control approach to mitigate the acoustic-caused probe vibration during atomic force microscope (AFM) imaging. Compensation for the extraneous probe vibration is needed to avoid the adverse effects of environmental disturbances such as acoustic noise on AFM imaging, nanomechanical characterization, and nanomanipulation. Particularly, residual noise still exists even though conventional passive noise cancellation apparatus has been employed. The proposed technique exploits a data-driven approach to capture both the noise propagation dynamics and the noise cancellation dynamics in the controller design, and is illustrated through the experimental implementation in AFM imaging application.