Improvement of piezoceramic scanners

摘要

The article is devoted to the problems of piezoscanners. The analysis of existent domestic and foreign constructions of piezoscanners is conducted. The design of the piezoceramic scanner on the basis of flat bimorph piezoelements of a trapezial form for scanning probe microscopes is offered and investigated. Built and probed model of this scanners through the package of the program Femlab 3.5.