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Optimization of TEM sample preparation methods by FIB for the increase of throughput

机译：FIB通过FIB进行TEM样品制备方法的优化

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This paper reports the optimized focused-ion-beam (FIB) sample preparation methods for transmission electron microscopy (TEM) analysis, which can prepare two samples at one time for 45nm and below technology nodes. The experimental results showed that these methods can help to reduce the cycle time, decrease the cost and improve the sample quality availably.

机译：本文报道了优化的聚焦离子束（FIB）样品制备方法用于透射电子显微镜（TEM）分析，其一次可以在45nm和以下技术节点下一次制备两个样品。实验结果表明，这些方法可以有助于降低循环时间，降低成本并可效率提高样品质量。

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来源
《IEEE International Symposium on the Physical Failure Analysis of Integrated Circuits 》|2013年||共4页
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作者
Shuqing Duan; Ruijuan Qi; Ming Li; Yanli Zhao;
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正文语种
中图分类半导体集成电路（固体电路） ;
关键词
TEM; failure analysis; sample preparation;

机译：TEM;失败分析;样品制备;

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专利

1. A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching [J] . Liebig J. P., Goeken M., Richter G., Ultramicroscopy . 2016 ,第Null期

机译：结合阴影FIB铣削和电子束辅助蚀刻的灵活方法，用于制备用于原位TEM表征的薄膜样品
2. A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching [J] . Liebig J. P., Goeken M., Richter G., Ultramicroscopy . 2016 ,第Null期

机译：用于制备用于原位TEM表征的薄膜样品的灵活方法，组合阴影 - FIB铣削和电子束辅助蚀刻
3. Alternative FIB TEM sample preparation method for cross-sections of thin metal films deposited on polymer substrates (Conference Paper) [J] . Rivera F., Davis R., Vanfleet R. Microscopy and microanalysis: The official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada . 2013 ,第4期

机译：用于沉积在聚合物基材上的金属薄膜横截面的另一种FIB TEM样品制备方法（会议论文）
4. Optimization of TEM sample preparation methods by FIB for the increase of throughput [C] . Shuqing Duan, Ruijuan Qi, Ming Li, 2013 20th IEEE International Symposium on the Physical amp; Failure Analysis of Integrated Circuits . 2013

机译：FIB优化TEM样品制备方法以提高通量
5. Development and Application of High-Throughput Sample Preparation Methods for Solid Matrices [D] . Aguilar, Lissette. 2014

机译：固体基质高通量样品制备方法的开发与应用
6. Comprehensive Evaluation and Optimization of Amplicon Library Preparation Methods for High-Throughput Antibody Sequencing [O] . Ulrike Menzel, Victor Greiff, Tarik A. Khan, -1

机译：高通量抗体测序扩增子文库制备方法的综合评价和优化
7. Specimen Preparation Methods with FIB for In-Situ TEM Observations in Materials Science
^^mdash;TEM Specimen Preparation by FIB with Glass Manipulator^^mdash; [O] . Toshiaki Suzuki, Yoshimasa Takahashi 2012

机译：具有FIB的样品制备方法，用于材料科学的原位TEM观测
^ ^ MDASH; FIB用玻璃机械手^ ^ mdash制备TEM样本;

Optimization of TEM sample preparation methods by FIB for the increase of throughput

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