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Optical Constants and Thickness Determination of Thin films using Envelope Method and Inverse Synthesis Method: a Comparative Study

机译:使用包络法和逆合合成方法的光学常数和厚度测定薄膜:比较研究

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摘要

Envelope method and Inverse synthesis method are two commonly used method for evaluating the optical constants and thickness of the thinfilms from the optical transmission measurement. The two methods along with their evaluation in terms of accuracy and simplicity are presented in this paper by determining the optical constants and thickness of ZrO_2-MgO thin films deposited by electron beam evaporation technique.
机译:信封方法和逆合合成方法是用于评估来自光学传输测量的光学常数和薄型的光学常数和厚度的两个常用方法。本文通过确定通过电子束蒸发技术沉积的ZrO_2-MgO薄膜的光学常数和厚度来提出这两种方法及其在精度和简单性方面的评价。

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