3D UV-LIGA microfabricated circuits for a wideband 50W G-band serpentine waveguide amplifier

机译：3D宽带50W G频带蛇形波导放大器的UV-LIGA微制耦合电路

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A wideband 220 GHz vacuum electronic amplifier is under development utilizing a novel method to fabricate 3D structures comprised of polymer monofilaments to form the beam tunnels and SU-8 to form the electromagnetic circuits. The complete structures are simultaneously formed in one UV-LIGA step. The method shows promise for THz VE microfabrication.

机译：利用新方法制造宽带220GHz真空电子放大器，用于制造由聚合物单丝组成的3D结构，以形成梁隧道和SU-8以形成电磁路。完整的结构同时形成在一种UV-LIGA步骤中。该方法显示了THZ VE微型制作的承诺。

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《International Conference on Infrared,Millimeter and Terahertz Waves》|2011年||共3页
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Joye Colin D.; Calame Jeffrey P.; Abe David K.; Nguyen Khanh T.; Wright Edward L.; Pershing Dean E.; Garven Morag; Levush Baruch;
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中图分类 TN8-53;
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4. 3D UV-LIGA microfabricated circuits for a wideband 50W G-band serpentine waveguide amplifier [C] . Joye Colin D., Calame Jeffrey P., Abe David K., 36th International Conference on Infrared, Millimeter, and Terahertz Waves . 2011

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3D UV-LIGA microfabricated circuits for a wideband 50W G-band serpentine waveguide amplifier

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