3D UV-LIGA microfabricated circuits for a wideband 50W G-band serpentine waveguide amplifier

机译：适用于50W宽带G波段蛇形波导放大器的3D UV-LIGA微制造电路

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A wideband 220 GHz vacuum electronic amplifier is under development utilizing a novel method to fabricate 3D structures comprised of polymer monofilaments to form the beam tunnels and SU-8 to form the electromagnetic circuits. The complete structures are simultaneously formed in one UV-LIGA step. The method shows promise for THz VE microfabrication.

机译：正在开发一种宽带220 GHz真空电子放大器，它利用一种新颖的方法来制造由聚合物单丝构成的3D结构以形成束隧道，并由SU-8构成电磁电路。整个结构在一个UV-LIGA步骤中同时形成。该方法显示了太赫兹VE微加工的前景。

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《36th International Conference on Infrared, Millimeter, and Terahertz Waves》|2011年|p.1-3|共3页
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Joye Colin D.; Calame Jeffrey P.; Abe David K.; Nguyen Khanh T.; Wright Edward L.; Pershing Dean E.; Garven Morag; Levush Baruch;
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4. 3D UV-LIGA microfabricated circuits for a wideband 50W G-band serpentine waveguide amplifier [C] . Joye Colin D., Calame Jeffrey P., Abe David K., International Conference on Infrared,Millimeter and Terahertz Waves . 2011

机译：3D宽带50W G频带蛇形波导放大器的UV-LIGA微制耦合电路
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3D UV-LIGA microfabricated circuits for a wideband 50W G-band serpentine waveguide amplifier

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