Study of Mass Transport for Efficient Fluid Processing

摘要

Cleaning processes as well as other liquid processes such as etching typically involve contact between a solid surface and a processing fluid. Typically the fluid flows along the surface of the substrate. Not in all cases this results in an enhancement of the process involved. The current study aims at providing deeper insight into the mass transport in order to be able to better optimize cost-effectiveness of the fluid processes. This study focusses on the mass transport through the fluid, particularly for the case of a laminar flow along the wafer surface. An analytical expression is proposed that presents a flow threshold above which the mass transport can be enhanced by a laminar flow.