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OVERVIEW OF ELLIPSOMETER AS AN ABSOLUTE WAY TO MEASURE D 3241 DEPOSIT THICKNESS

机译:椭圆概述概述是测量D 3241沉积物厚度的绝对方法

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Ellipsometry is a non-contact optical technique used to measure thin film thickness in nanometer range. ASTM D3241 includes visual rating of film deposits on the specimen heater tube. Visual rating by individual operators has proven to be very subjective. At the 5th International Conference on Stability, Handling, and Use of Liquid Fuels in 1994 a paper was presented on a study that demonstrated Ellipsometry can provide an absolute measurement of heater tube deposit film thickness. ASTM member firms then sought out an Ellipsometer manufacturer to develop an application specific Ellipsometer for use in measuring D3241 film deposit thickness. A product was developed and provided the capability, but then discontinued. Falex Corporation was asked by ASTM members to resurrect the Ellipsometer. Specific goals include improvements in application specific capability, ability to measure tubular specimen, measurement repeatability and reproducibility. Falex developed and manufactures the Model 430 Ellipsometer. A study was performed to demonstrate the capability of the Falex Ellipsometer by first measuring multiple heater tube's film deposit thickness using multiple original manufactured Ellipsometers. The study then measured the same deposits using the new Falex Ellipsometer Model 430. The study presents the Falex Ellipsometer provides comparative results with excellent reproducibility and repeatability. It presents the goals of the new Ellipsometer, how they were met, use of new robust user friendly operator interface, ease of operation, features and their benefits.
机译:椭圆测定法是用于测量纳米范围内的薄膜厚度的非接触式光学技术。 ASTM D3241包括在样品加热器管上的薄膜沉积物的视觉额定值。个人运营商的视觉评级已被证明是非常主观的。在1994年第5次国际稳定性,处理和使用液体燃料的国际会议上,提出了一项纸张的研究,展示椭圆测量可以提供加热器管沉积膜厚度的绝对测量。然后,ASTM成员公司向制造商寻求椭圆型计,用于开发用于测量D3241薄膜沉积厚度的应用特定椭圆仪。开发了一种产品并提供了能力,但随后停止。 ASTM成员要求Falex Corporation恢复椭圆仪。具体目标包括应用特定能力的改进,测量管状标本的能力,测量可重复性和再现性。 Falex开发并制造了430型椭圆幅度。进行研究以通过首先使用多个原始制造的椭圆仪测量多个加热器管的薄膜沉积物厚度来证明Falex椭圆仪的能力。然后使用新的Falex椭圆表模型430测量相同的沉积物。该研究提出了Falex椭圆仪提供的比较结果,具有优异的再现性和可重复性。它介绍了新椭圆仪的目标,它们如何满足它们,使用新的强大用户友好的操作员界面,易于操作,功能及其优势。

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