A fast calculation method to compute secondary fluorescence near phase boundaries in electron probe microanalysis is described. Secondary fluorescence intensities are calculated by numerically integrating the equations that describe the emission of fluorescence by photoelectric absorption of primary X-rays (characteristic and bremsstrahlung) from a couple of two semi-infinite, adjacent materials, when the electron beam impacts on one of them. The reliability of the developed calculation is assessed by comparing calculated fluorescence k-ratios, as functions of the distance of the electron beam to the interface, with experimental data available in the literature and with the results of Monte Carlo simulation using code PENELOPE.
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