Design and Performance Testing of a Differential Leverage and Flexible Hinge-based Nanopositioning Stage with Large Travel Range

摘要

In this paper, design and performance testing of a one-dimensional nanopositioning stage are presented. Actuated by a differential leverage, the stage is capable of nanopositioning over a large travel. Flexible hinge stiffness, input reaction, magnification ratio are firstly analyzed in consideration of material mechanics and structural vibration. And then the finite element analysis is used for validation of the amplification ratio and admissible stress. Finally, the experimental setup is developed and performance of the stage is tested. The results show that the stage has a travel range over 200 μm and a resolution about 10 nm. The proposed stage can be used for large travel nanopositioning with high resolution.