Theoretical analysis of development behaviorof resist measured by QCM

摘要

Quartz-crystal-microbalance (QCM) data were simulated using the characteristic matrix method on a four-layer model.The calculated surfaces of resonance frequency and impedance visualize well their dependencies on the thickness of thedry layer, the thickness and the rigidity of the swelling layer during development. The ideal and swelling dissolutions bythe Case II diffusion with high rigidity were analyzed using the same surface of the resonance frequency, which givesvisually the condition for the Sauerbrey's relation. The larger thickness of swelling layer and the larger decrease ofrigidity during the development show the undulating surfaces of the resonance frequency and impedance, whichrepresent QCM traces with a single-peak, a double-peak or sequential double peaks during the development. Thecharacteristic-matrix analysis has shown the validity of quantitative analysis of QCM data.