Torsional microresonator in the nonlinear regime: experimental, numerical and analytical characterization

摘要

The dynamic behavior of a torsional microresonator is characterized analytically, numerically and experimentally both in the linear and nonlinear regime. Starting from the work presented in [1], here, the highly nonlinear regime is considered and the dynamic pull-in is experienced. Very good agreement between experimental data and numerical model is found also when the analytical methods usually employed to describe the nonlinear dynamic behavior of MEMS (multiple scale methods) are no more accurate. Finally, a numerical limit domain for the microresonator safe operation region in terms of bias and actuation voltages is computed and validated with experimental data.