Monolithically Integrated Double-Ended Tuning Fork- Based Oscillator with Low Bias Voltage in Air Conditions

摘要

This paper shows the results of fabrication and characterization of a CMOS oscillator with an integrated electrostatically self-excited and low voltage MEMS resonator monolithically fabricated in a commercial CMOS technology (AMS 0.35μm). Oscillation is achieved at a low DC bias voltage of 3.8V in air conditions. Measurements in vacuum conditions achieve oscillator performance even with a 0V dc polarization. In this case the effective applied voltage is 2V due to the dc polarization of the input CMOS amplifier. These low dc biasing voltages are for author's knowledge the smallest DC voltage applied in MEMS based oscillators in air and vacuum conditions.