In this paper, we present the topology optimization procedure, fabrication and characterization results for electrothermally actuated polysilicon microgrippers for nanomanipulation purposes. In our previous work [1], we compared the performance of topology optimized actuator with the conventional three-beam electrothermal actuators [2] of the same size through finite-element simulations and experiments. Here, we further improve the topology optimized microgripper design and demonstrate the preliminary results of pick-and-place nanomanipulation experiments performed, where carbon nanotubes (CNTs) are transferred on four-point probes for electrical characterization.
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