MICROELECTROMAGNETIC ENERGY HARVESTER WITH INTEGRATED MAGNETS

摘要

This paper presents a microelectromagnetic power generator with integrated magnets that can be fabricated on silicon wafers in a batch process. The generator is fabricated by MEMS technologies and characterized at different vibration frequencies, amplitudes and load resistances. This compact generator occupies a volume of 15×13×0.4mm~3, as no external permanent magnets are needed. Experimental results show that with a 20-turn spiral coil, the device can generate an induced electromotive force (EMF) of 0.27mV at a vibration frequency and amplitude of 350Hz and 10μm, respectively.