SYNCHRONIZED OSCILLATION IN MICRO MECHANICALLY COUPLED OPPOSITE C-SHAPED CANTILEVER-BASED OSCILLATOR SYSTEM

摘要

A novel oscillation system, consisting of an opposite C-shaped cantilever and a beam-shaped cantilever, has been newly designed, preliminarily fabricated and characterized for synchronized oscillation-based ultimate sensing applications. Two geometrically different cantilevers, with resonant frequencies of 300.76 kHz (detecting) and 149.77 kHz (sensing), are coupled by two coupling overhangs as micromechanical elements. However, under synchronized oscillation, frequency response signal (182.85 kHz) was doubled (365.71 kHz) from low frequency cantilever (opposite C-shaped) to high frequency cantilever (beam-shaped). A flat interval with a frequency ratio of 2.00 corresponding to a stable synchronization region was further confirmed. This implies that it is possible to enlarge the frequency response signal from the low frequency cantilever to the high frequency cantilever based on this kind of super harmonic synchronization.