The Key Technologies and Advances of Ultra-precision Single-plane Polishing and Lapping Devices

摘要

Some technologies of ultra-precision single-plane polishing and lapping devices, including spindle section, polishing pad, cooling system, dressing system and pressurization system are discussed. The development trends of ultra-precision single-plane polishing and lapping devices are also analyszed as more controllable, integrated and high-precision in the future.