The effect of Pt metal thickness on the hydrogen sensing sensitivity of Pt-coated, multi-layered graphene grown by chemical vapor deposition on Si-polar 4H-SiC, was investigated. As-grown graphene samples and graphene samples coated with 1nm or 4nm thick Pt films were used in this study. Compared to graphene without platinum, significantly improved hydrogen detection sensitivity was observed with the addition of platinum films. The highest hydrogen sensitivity was observed with the graphene sensor with 1nm platinum coating. The platinum coated graphene sensor also showed good selectivity for hydrogen detection over methane, ammonia, oxygen, and nitrogen oxide.
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