We have developed a new millimeter-wave detector. The detector consists of a micro bolometric detecting part, a micro heater and a micro antenna. Vanadium oxide thin film was deposited for thermal detecting materials. The micro log-periodic bow-tie antenna having resonance frequency of 140GHz was designed and simulated. The antenna coupled detectors were fabricated by MEMS technology. The fabricated detector showed resonance frequency of 140GHz which is the same as simulation result and large TCR value of 4%.
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